Pumping speed:
0 m3h-1
Diffusion pump
Comparative pumping speed 11580 ls-1
ISO pumping speed†
Nitrogen 6500 ls-1
Helium 7200 ls-1
AVS pumping
Nitrogen 7220 ls-1
Helium 8000 ls-1
Maximum throughput (nitrogen) 18 mbar ls-1
13,5 Torr ls-1
Critical backing pressure (DC704EU) 1,4 mbar
1 Torr
Minimum backing pump displacement for maximum throughput 94 m3h-1
55 ft3min-1
Recommended backing pump‡ GV80, E2M80, E2M175
Recommended fluid DC704EU
Fluid charge (dry) 2400 ml / 2,5 qt
Inlet/backing connection ANSI16/ANSI3 or ISO500/ISO100
Water connection 3/4 inch NPT female
Heater power 9 kW / 12 hp
Warm up time 60 min
Minimum cooling water flow at 25°C 700 l h-1 / 3,1 US gal min-1
Pressure drop across cooling water supply 1 bar / 14,5 psi
Weight 185 kg / 408 lbs
† ISO speed and throughout data obtained with total pressure measurement. Partial pressure readings typically increase data by ~30%. ISO speed measurements are typically 10% less than AVS measurements for the same pump.
‡ These are given for guidance, please contact Edwards for a recommendation of pump combinations best suited to your application.