Pumping speed:
135 m3h-1
Vacuum depth:
1.3 mbar
Diffusion pump
Comparative pumping speed 18000 ls-1
ISO pumping speed†
Nitrogen 8000 ls-1
Helium 16000 ls-1
Maximum throughput (nitrogen) 24 mbar ls-1
18 Torr ls-1
Critical backing pressure (DC704EU) 1,3 mbar
1 Torr
Minimum backing pump displacement for maximum throughput 135 m3h-1
80 ft3min-1
Recommended backing pump‡ GV80, E2M80, E2M175
Recommended fluid DC704EU
Fluid charge (dry) 3600 ml / 3,8 qt
Inlet/backing connection ANSI20/ANSI4 or
Water connection 3/4 inch NPT female
Heater power 12,6 kW / 16,9 hp
Warm up time 60 min
Minimum cooling water flow at 25°C 960 l h-1 / 4,2 US gal min-1
Pressure drop across cooling water supply 1,2 bar / 17,4 psi
Weight 275 kg / 605 lbs
† ISO speed and throughout data obtained with total pressure measurement. Partial pressure readings typically increase data by ~30%. ISO speed measurements are typically 10% less than AVS measurements for the same pump.
‡ These are given for guidance, please contact Edwards for a recommendation of pump combinations best suited to your application.