EPX180NE
Type:
Pumps
Manufacturer:
Edwards
Pumping speed:
170 m3h-1
Vacuum depth:
0.0001 mbar
Category:
Turbo molecular pump
| Peak speed | 170 m3h-1 |
| 105 ft3min-1 | |
| 2835 lmin-1 | |
| Ultimate vacuum | |
| <1 x 104 mbar | |
| <7,5 x 10-5 Torr | |
| <1 x 10-2 Pa | |
| Warm-up time (to nominal performance) | 30 min |
| Inlet flange | ISO63 |
| Outlet flange | NW25 |
| Noise | <59 dB(A) |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 – 35 °C |
| Nitrogen supply interface | 1/4 in (6,5 mm) tube |
| Nitrogen supply pressure | 3 x 105 – 7 x 105 pa |
| Minimum nitrogen purity | 99,95% |
| Electrical Supply | 200/208 V, 50/60 Hz 3 phase |
| Power at ultimate | 1,4 kW |
| Rated motor power | 3,0 kW |
| TIM | C3 |
| Weight | 43,5 kg |
Baltic Condition