EPX500NE
Type:
Pumps
Manufacturer:
Edwards
Pumping speed:
500 m3h-1
Vacuum depth:
6.0E-6 mbar
Category:
Turbo molecular pump
| Peak speed | 500 m3h-1 |
| 295 ft3min-1 | |
| 8338 lmin-1 | |
| Ultimate vacuum | |
| <1 x 10-6 mbar | |
| <7,5 x 10-7 Torr | |
| <1 x 10-4 Pa | |
| Warm-up time (to nominal performance) | 30 min |
| Inlet flange | ISO160 |
| Outlet flange | NW25 |
| Noise | <59 dB(A) |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 – 35 °C |
| Nitrogen supply interface | 1/4 in (6,5 mm) tube |
| Nitrogen supply pressure | 3 x 105 – 7 x 105 Pa |
| Minimum nitrogen purity | 99,95% |
| Electrical Supply | 200/208 V, 50/60 Hz 3 phase |
| Power at ultimate | 1,4 kW |
| Rated motor power | 3.0 kW |
| TIM | C3 |
| Weight | 45,2 kg |
Baltic Condition