Pumping speed:
0 m3h-1
Vacuum depth:
6.0E-8 mbar
Turbo molecular pump
Inlet flange DN100ISO-K, DN100CF
Outlet flange DN25NW
Pumping speed
N2 300 ls-1
He 340 ls-1
H2 280 ls-1
Compression ratio
N2 >1 × 1011
He 1 x 106
H2 5 x 104
Ultimate pressure with RV backing pump ISO/CF <6 x 10-8 / <5 x 10-10 mbar
Recommended backing pump* RV12/nXDS10i
Vent port 1/8 inch BSP female
Purge port 1/8 inch BSP female
Max continuous inlet flow (Nitrogen)†
Water cooling (water at 15°C, ambient temp at 40°C) 95 sccm
Forced air cooled, 35 °C ambient 115 sccm
Pump rotational speed
Nominal rotational speed 60000 rpm
Standby rotational speed Variable from 33000 to 60000 rpm (42000 rpm default)
Programmable power limit settings Variable from 50-200W (160W default)
Start time to 90% speed 145s‡
Analogue outputs Pump rotational speed; Power consumption; Pump temp; Controller temp
Cooling method# Forced air / water
Ambient air temp for forced air cooling 5 - 35°C
Min cooling water flow rate (water 15°C) 15 l h-1
Water temp range 10 - 20°C
Max inlet flange temp 80°C
Operating attitude Vertical and upright, through to Horizontal +/- 2°
Noise level at 1 metre <45 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC200 turbo and instrument controller
Quiescent electrical power Typically 20W