Edwards is a leading developer and manufacturer of sophisticated vacuum products, abatement solutions and related value-added services. Their products are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.

Vacuum pumps
Edwards Oil/Dry vacuum pumps
Oil/Dry vacuum pumps

nXDS Scroll Pumps


With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best performing pump in its class.

nXDS improves on legacy XDS pumps by offering increased pumping speeds, combined with lower ultimate pressures, lower power consumption and lower noise - up to 20 times quieter than other pumps. Gas ballast allows for pumping of condensable vapours including, water, solvents, dilute acids and bases. nXDS pumps also feature the latest in tip seal technology giving significantly longer life between tip seal changes. Integrated inverter drive with auto sensing voltage input delivers optimised pumping performance globally. 

nXDS pumps are designed to be completely field serviceable. Its intelligent control functions and up to five year service interval offer low cost of ownership, making it the small dry pump of choice for today’s most advanced technologies.

Better Work Environment & Low Environmental Impact: Quiet Operation
Simple Operation: Intelligent & Easy to Use Controls
No Contamination & No Oil to Dispose Of: Hermetically Sealed for a Lubricant-Free Vacuum Environment
Low Cost of Ownership: Long Service Interval & Low Power Consumption
Quicker Process: Superior Vapour Handling

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Rotary two-stage pumps (Oil)


E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps
Small EM series pumps are rugged mechanical oil-sealed pumps with speeds of 0.7 and 1.5 m3/hr. Compact and quiet, they feature advanced lubrication circuits, high reliability, and accessories to suit specific application needs.

RV Rotary Vane Pumps
The Edwards RV series of oil sealed rotary vane pumps are unique in their capability to offer both high vacuum and high throughput performance, which combined with ultra-low noise levels and excellent gas ballast facility, makes them ideal for a wide range of applications and environments. These are available with speeds ranging from 3 to 12 m3/hr.

EM Series Oil-Sealed Rotary Vane Vacuum Pumps (Small)
EM Series pumps are rugged, mechanical oil-sealed pumps with speeds ranging from 0.7 to 28 m3/hr depending on model size and stage. Compact and quiet, they feature advanced lubrication circuits, high reliability, and accessories to suit your specific application needs.
Quiet Operation:Better Working Environment
Reliable Performance:Proven in a range of laboratory and industrial applications
Free standing unit and compact design:Flexibility of use
Gas ballast valve:Large vapour handling capacity

ES Single Stage Rotary Vane Pumps
The Edwards ES range of pumps represents a significant advancement in single stage oil sealed rotary vane pumps.
Enhanced performance: Class-Leading Ultimate Vacuum Level & Extended Operating Pressure Range
Stability: Stable Vacuum Performance, with No Pressure Fluctuations
Convenience: Combined ISO/BSP Connection, Easily Serviceable on Site
Flexibility: Use Individually or with Mechanical Booster Pumps, for a Wide Range of Applications

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Diaphragm type


D-Lab Diaphragm Pumps
The Edwards range of diaphragm pumps offer clean pumping in a lightweight and compact design making them ideal for clean laboratory applications. Pumps can operate independently or as part of a modular system and require minimal maintenance. These are available with pumping speeds upto 2 m3/hr.

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Edwards Turbomolecular pumps

Turbomolecular pumps

Edwards – world leader in vacuum technology – introduces the nEXT generation of turbomolecular pump. Built upon over a decade of experience with the tried and trusted EXT and STP ranges (with in excess of 200,000 units in the field), nEXT sets the new benchmark for scientific turbo pumps. The nEXT platform brings a high level of modularity to offer maximum flexibility for customer application and requirements. Each pump is available in two different internal configurations to offer differing performance.

The nEXT85 has arrived!
It’s small, it’s intelligent and performance will exceed your expectations. The nEXT85 turbomolecular pump is our latest addition to the Edwards product portfolio, and set to be a real winner across the R&D, High Energy Physics and Analytical Instrument sectors. Small and Powerful. nEXT85 pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance, in a reduced footprint.  In addition to enhanced performance the nEXT85 benefits from the same service and operational functionality as the larger nEXT, including field serviceability and in-built intelligence, for a truly class leading product. The pump has been totally re-designed to optimise performance and achieve both greater speeds and higher compressions, while maintaining increased levels of reliability in a small package.

EXT Turbomolecular Pumps
Our EXT Compound Turbomolecular Pumps provide a reliable, hydrocarbon-free high and ultra high vacuum.Combining the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage, with the added convenience of an on-board controller and a 24V d.c. motor, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.
Compact Design: High Performance for Efficient Systemisation
Reliable: Permanent magnetic upper bearing and oil lubricated bottom bearing for worry-free operation
Compatible with Edwards TAG and TIC Turbo Instrument Controller: Add up to 3 Vacuum Gauges Without the Need of an Additional Gauge Controller
RoHS Compliant
CSA/ULC Approved

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Edwards Diffusion pumps

Diffusion pumps

Small Diffusion Pumps - Diffstak Vapour Pumps
The Edwards Diffstak vapour diffusion pumps are compact, water-cooled pumps with integral cooled baffles which provide exceptionally clean pumping. The proven design ensures very low backstreaming, reduced outgassing and minimized sealing requirements. These pumps are offered with integral manual or pneumatic high vacuum valves.
High Throughput Diffusion Pumps
The Edwards HT and EO diffusion pumps offer the highest throughput (pressure multiplied by pumping speed) of any comparable sized pump, making them ideal for industrial processes that involve large quantities of gases. These diffusion pumps can be used on processes with high critical backing pressure and feature baffles to ensure backstreaming is minimized.

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Edwards Pumps for semiconductor production

Pumps for semiconductor production

iXL Dry Pumps
iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.
iH Dry Pumps
The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.
EPX Vacuum Dry Pumps
The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications. The EPX Series offers on-tool pumping in a very light small package and delivering exceptionally clean vacuum.. Using a unique, patented, single-shaft regenerative Holweck® stage mechanism, EPX pumps are capable of evacuating from atmosphere to ultimate pressures of Torr. Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated MicroTIM electronics also provide simple communication connections to the process tool.
iGX Dry Pumps
The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations - in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options.
GX Dry Pumps
The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

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Edwards Industrial dry-type pumps

Industrial dry-type pumps

GXS Dry Pumps
Edwards, the pioneer in dry pumping technology, launches a new generation of dry vacuum pumps for industrial applications. With more than 90 years vacuum experience and over 150,000 dry pumps installed world wide, Edwards leads the way in every vacuum application including those handling harsh dust and process contaminants.Edwards GXS range incorporates our unique screw technology with a world leading high efficiency drive to achieve excellent vacuum performance and low running costs.  With advanced temperature control, low maintenance and long service intervals, the GXS is the most robust and economical vacuum pump that establishes a new standard in dry pumping.

Drystar 80 Pumps
Edwards Drystar 80 dry vacuum pump is configured for ease of installation and commissioning while providing a clean, robust and cost effective alternative to traditional oil-sealed pumps. The Drystar 80 is designed to handle large volumes of condensable vapours and particulate loads to provide a consistent pumping performance, minimal service intervention and low cost of ownership.  The use of dry pumping technology and unique seal design will eliminate contamination throughout the vacuum process making the Drystar 80 suitable for a range of applications and environments.

IDX Dry pumps
The Edwards IDX dry pumps use the latest screw technology to provide a clean, effluent free vacuum. These pumps offer the ability to handle large volumes of dust and water vapor without any loss of performance while minimizing maintenance requirements and running costs. The IDX dry pumps are capable of continually operating from atmosphere to ultimate. 

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Edwards Two-stage large and medium rotary vacuum pumps

Two-stage large and medium rotary vacuum pumps

EM Series Oil-Sealed Rotary Vane Vacuum Pumps (Medium & Large)
EM Series pumps are rugged mechanical oil-sealed pumps with speeds ranging from 0.7 to 275 m3/hr (30 to 206 CFM). Compact and quiet, they feature advanced lubrication circuits, high reliability, and accessories to suit specific application needs.

Stokes Microvac Series Oil Sealed Pumps
The Edwards Microvac rotary piston pumps set the standard for performance and reliability as the industries most efficient, space saving design. The design has been improved, upgraded and fine tuned to deliver even better dependability and productivity combined with minimal maintanance and process downtime.

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Edwards Chemical dry-type pumps

Chemical dry-type pumps

CXS Chemical dry pumps
The CXS incorporates innovative screw design features with simplicity and reliability in mind, a ‘Plug and Pump’ philosophy has been adopted. As a result, the CXS has industry leading reliability, safety and low cost of ownership.

CDX Dry pumps
The Edwards CDX dry pumps use the latest screw technology to provide a clean, effluent free vacuum specifically for the chemical, pharmaceutical and petrochemical industries. These pumps offer the ability to handle large volumes of dust and water vapor without any loss of performance while minimizing maintenance requirements and running costs. The CDX dry pumps are capable of continually operating from atmosphere to ultimate and offer excellent temperature control with indirect cooling fitted as standard.

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Edwards booster


EH Mechanical Booster Pumps
The Edwards EH mechanical booster pumps feature a unique hydrokinetic drive which provides efficient power transmission with benefits in economy, performance and compactness. These booster pumps are suitable for use with high differential pressures which allow the booster pump to be started at the same time as the backing pump, reducing total pump down times.

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Measurement and control

Measurement and control

Edwards TIC controllers - it is simple and easy to use instruments for vacuum pumps and systems maintenance, management and data acquisition. The controller can identify and manage up to 6 sensors, interface with Windows available.

Edwards ADC (Active digital controler) controller - The Edwards Active Digital Controller (ADC) is a compact single gauge controller and display. It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. The ADC is available in standard and enhanced versions. The standard controller displays the pressure measured by a single active gauge. The enhanced controller supports two similar gauges, is equipped with two variable hysteresis set-points which are linked to 48V dc 1A changeover relays, and two 0-10V dc analog outputs. An RS232 interface is also available on the enhanced version.

APG100 Active Pirani Vacuum Gauge
Edwards APG100 Active Pirani Vacuum Gauges are available in either standard or corrosion resistant versions offering measurement from atmosphere to 10-3 or 10-4 respectively. They are compatible with all Edwards TIC Instrument controllers and are fully RoHS compliant.

APGX-H Active Linear Convection Gauges
The new Edwards Linear Convection Gauge has a wide measuring range from 1333 to 3 x 10-4 mbar (1000 to 2.3 x 10-4 Torr). The use of convection technology ensures, accuracy and sensitivity are maintained to the top of the range. The gauge is compact and may be mounted in any orientation, simplifying installation where space is limited. The gauge incorporates a setpoint and two LEDs, which indicate setpoint and gauge status. For reduced cost of ownership, the gauge is provided with a replaceable tube, in which calibration data is stored.

ATC Active Thermocouple Gauge
The Edwards Active Thermocouple (ATC-E) gauges mount directly on the thermocouple tube to form a compact, stand-alone transducer. The ATC-E electronics module drives both medium and low pressure gauge tubes providing a package that offers a cost effective measuring solution for higher pressures.

ASG Active Strain Gauge
The Edwards Active Strain Gauge (ASG) is a rugged, corrosion resistant diaphragm gauge which provides accurate, gas independent measurement from 2000 mbar to 1 mbar. It can be used as a standalone transducer allowing OEMs and system builders to develop low cost, flexible solutions to their vacuum instrumentation needs. Alternatively, it can be connected to the Edwards Active Gauge Controller where it can be combined with many other sensor types to provide a complete vacuum instrument solution.

AIM Active Inverted Magnetron Gauge
The Edwards Active Inverted Magnetron Gauges (AIM) combine the gauge-head and control electronics in one compact Active unit. These gauges have proved to be rugged and reliable in a wide range of applications ranging from scientific instruments to industrial processes.

WRG Wide Range Gauge
The Wide Range Gauge (WRG) family offers the capability of single port pressure measurement in the range atmosphere to 10-9 mbar, with a linear output. It’s a compact solution, halving the space and connectivity hardware requirement, which can be all important in many applications. The WRG has many novel features, including a patented striker, pushbutton calibration and set point controls and comprehensive diagnostics. The WRG is a cost-effective vacuum management solution when used either with a Edwards controller or directly integrated into the vacuum system controls.

AIGX Active Ion Gauge
The Edwards Active Ion Gauge (AIGX) is a compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 5 x 10-2 to 5 x 10-10 Torr (6.6 x 10-2 to 6.6 x 10-10 mbar) and a 1 Volt/decade linear output. The Edwards AIGX incorporates all benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments. The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

CG16K Capsule Dial Gauge
Edwards CG 16K capsule dial gauges are barometrically compensated dial gauges which cover the pressure ranges from atmosphere down to 1 mbar absolute. These robust gauges provide accurate, repeatable performance even at low pressures making them equally suited for non-corrosive process plant or for laboratory applications.

GasCheck G3 Leak Detector
Introduced as an enhanced replacement for the popular GasCheck 3000, the Gascheck G3 incorporates a new backlit dot matrix LCD for improving viewing in poor lighting and leak rate indication by both flashing LED and sounder, for easier use in all environments. In addition the GasCheck G3 has a new tactile keyboard with fewer keys and improved temperature stability for better performance in uncontrolled areas. 

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Vacuum valves, connectors and other fittings

Vacuum valves, connectors and other fittings

We can offer a wide range of different connectors, valves, not only for Edwards but also to other vacuum pumps and vacuum systems.

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Parts, accessories, lubricants

Parts, accessories, lubricants

Emission control system

Emission control system